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Introduction to MEMS & Microsystems
Lecture Series on MEMS & Microsystems by Prof. Santiram Kal, Department of Electronics & Electrical Communication Engineering, I.I.T,Kharagpur.

 Introduction to MEMS & Microsystems
 
 Introduction to MEMS & Microsystems

MEMS Materials

Lecture Series on MEMS & Microsystems by Prof. Santiram Kal, Department of Electronics & Electrical Communication Engineering, I.I.T,Kharagpur. For More details on NPTEL visit http://nptel.iitm.ac.in

Lecture - 5 MEMS Materials 

 

MEMS Materials' Properties

Lecture Series on MEMS & Microsystems by Prof. Santiram Kal, Department of Electronics & Electrical Communication Engineering, I.I.T,Kharagpur. For More details on NPTEL visit http://nptel.iitm.ac.in

 

 

 

 A review of micropumps

A pump using three piezo transducers in a peristaltic firing order. Transducers are driven by three square waves, 60 degrees out of phase. Square wave is +35V -35V (70Vpp) and draws 3mA.

Exploring Shape Memory Alloys

Exploring Shape Memory Alloys

Nitinol - Memory Wire Experiments

Tiny robotic hand has the gentlest touch

Tiny robotic hand has the gentlest touch

A tiny pair of robotic tweezers with the most sensitive grip yet can pick up and move individual cells without damaging them, guided by their own sense of touch. They could be used to probe the properties of living tissue, or create microscale and nanoscale devices.

FT-G Microgripper

The FT-G Microgripper series is designed to handle micro- to nanometer-sized objects. The initial openings of the gripper arms are 30 μm, 60 μm and 100 μm (respectively customizable up to 400 μm). The opening can be controlled with nanometer precision, such that the gripper arms are fully closed upon applying the maximum actuation voltage.

Microcantilevers

Sensitivity improvement of a microcantilever based mass sensor

 SU-8 cantilevers

Nanomechanical cantilevers for biochemical sensing (parylene cantilever)

Silicon Carbide cantilever

An array of cantilever actuators 

SU-8, Parylene are polymers 

 

piezoelectric crystal structure

piezoelectric crystal structure
 Reference: Piezoelectric Multilayer Beam Bending Actuators: Static and Dynamic Behavior and Aspects of Sensor Integration (Microtechnology and MEMS by Rüdiger G. Ballas

Manifold Air Pressure Sensor

The MAP sensor (Manifold Air Pressure Sensor) is a main input to the ECM or engine computer. The MAP sensor measures the difference in air pressure between the intake manifold and atmospheric pressure. The ECM infers engine load from the MAP sensor reading.The MAP sensor converts engine vacuum and boost pressure into a varying output voltage, between 0-5 volts.

Manifold: The primary function of the intake manifold is to evenly distribute the combustion mixture (or just air in a direct injection engine) to each intake port in the cylinder head(s). Even distribution is important to optimize the efficiency and performance of the engine. (source: wikipedia)

 

MEMS pressure sensor

Piezoresistive MEMS pressure sensor

MEMS sensors: past, present and future

The article describes the historical development of micro-electromechanical system (MEMS) sensor technology, to consider its current use in physical,gas and chemical sensing and to identify and discuss future technological trends and directions.MEMS sensors: past, present and future

MDPI - Open Access Publishing

MDPI is a publisher of peer-reviewed, open access journals since its establishment in 1996.

MDPI.com (where MDPI stands for Multidisciplinary Digital Publishing Institute) is a platform for peer-reviewed, scientific open access journals which is operated by MDPI AG, based in Basel, Switzerland. MDPI publishes over 70 diverse electronic, open access journals.

 http://www.mdpi.com/

memsnet

An information portal for the MEMS and Nanotechnology community
https://www.memsnet.org/news/

Famous MEMS Products (Top Ten MEMS Products)

Famous MEMS Products (Top Ten MEMS Products)
http://memscentral.com/famous_mems_products.htm