MEMS Module VI materials

Reference Text

1. Smart Material Systems and MEMS: Design and Development Methodologies  Author(s): Vijay K. Varadan , K. J. Vinoy
2. Foundations of MEMS, Chang Liu

Supplementary Materials
Smart Sensors for Structural Health Monitoring

http://www.sensorsportal.com/HTML/DIGEST/march_2018/Vol_221/P_2978.pdf

A PVDF-Based Sensor for Internal Stress Monitoring of a Concrete-Filled Steel Tubular (CFST) Column Subject to Impact Loads

https://www.mdpi.com/1424-8220/18/6/1682/htm

Surface acoustic wave acceleration sensor with high sensitivity incorporating ST-X quartz cantilever beam

https://iopscience.iop.org/article/10.1088/0964-1726/24/1/015015

MEMS Gyroscope
http://clifton.mech.northwestern.edu/~me381/project/done/Gyroscope.pdf

01EC6102 - MEMS -Slides 2

Microfabrication Processes

Bulk Micromachining

Surface Micromachining

Micromolding Techniques _LIGA

Micro stereolithography

Case Study - Blood Pressure Sensors

Fundamentals of Piezoelectricity

Supplementary material

Fundamentals of Piezoelectricity

01EC6102 - MEMS -Slides

• Introduction

• Material and Scaling Laws

• Sensors and Actuators