piezoelectric crystal structure
Reference: Piezoelectric Multilayer Beam Bending Actuators: Static and Dynamic Behavior and Aspects of Sensor Integration (Microtechnology and MEMS by RĂ¼diger G. Ballas
Reference: Piezoelectric Multilayer Beam Bending Actuators: Static and Dynamic Behavior and Aspects of Sensor Integration (Microtechnology and MEMS by RĂ¼diger G. Ballas