A brief review of actuation at the micro-scale using electrostatics, electromagnetics and piezoelectric ultrasonics

A brief review of actuation at the micro-scale using electrostatics, electromagnetics and piezoelectric ultrasonics

 The characteristics of electrostatic, electromagnetic and piezoelectric transduction for generating motion at the micro scale is considered, employing scaling laws and a reasoned consideration of the difficulties in motor fabrication and design using each method. 

http://goo.gl/LL6Sxm

http://users.monash.edu.au/~lyeo/Dr_Leslie_Yeo/Publications_files/31_115.pdf