W. Trimmer, ‘‘Microrobots and micromechanical systems,’’ Sens. Actuators, 19, 267–287 (1989)

The classic paper on scaling in microsystems by Trimmer

W. Trimmer, ‘‘Microrobots and micromechanical systems,’’ Sens. Actuators, 19, 267–287 (1989)

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Also read
http://home.earthlink.net/~trimmerw/mems/Scale.html