A 2D thermal MEMS accelerometer uses a monolithic approach that integrates the sensor and
electronics onto the IC which is then hermetically sealed in a package. The silicon die includes a
heating element and thermopiles suspended over a cavity etched into the die. Instead of using
capacitance to measure force, the thermal sensor uses the movement of the heated gas molecules
to detect acceleration. With acceleration, the heated molecules move in the direction of
acceleration, and with zero acceleration the heated gas is symmetrical above the heater. These
devices have no flexing or moving parts, which make them more durable and delivers very high
measurement repeatability.
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