Silicon micromachining for realizing micro mechanical structures has received
considerable interest due to the several advantages of this technology over the conventional
machining techniques. Silicon pressure sensors were the first micro mechanical transducers
developed. Since then the market for micromachined pressure sensors has grown in leaps and
bounds and found application in all walks of life including defense and space applications. The
relevant micromachining technology and the design considerations are reviewed in this paper.
The paper also gives the latest developments in this area and gives the details of the polysilicon
piezoresistor based pressure sensors with Silicon On Insulator (SOI) approach for integrating
pressure sensor and associated electronics.
Prof. K.N. Bhat, IISC Bangalore
SiliconMicromachined Pressure Sensors
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