W. Trimmer, ‘‘Microrobots and micromechanical systems,’’ Sens. Actuators, 19, 267–287 (1989)

The classic paper on scaling in microsystems by Trimmer

W. Trimmer, ‘‘Microrobots and micromechanical systems,’’ Sens. Actuators, 19, 267–287 (1989)

Download the Paper


Also read
http://home.earthlink.net/~trimmerw/mems/Scale.html

A brief review of actuation at the micro-scale using electrostatics, electromagnetics and piezoelectric ultrasonics

A brief review of actuation at the micro-scale using electrostatics, electromagnetics and piezoelectric ultrasonics

 The characteristics of electrostatic, electromagnetic and piezoelectric transduction for generating motion at the micro scale is considered, employing scaling laws and a reasoned consideration of the difficulties in motor fabrication and design using each method. 

http://goo.gl/LL6Sxm

http://users.monash.edu.au/~lyeo/Dr_Leslie_Yeo/Publications_files/31_115.pdf

Photos of some MEMS Devices

Photos of some MEMS Devices

http://goo.gl/mrJPZv

http://www.eng.auburn.edu/~deanron/MEMSPhotos.pdf

MPX series Pressure sensors

MPX series Pressure sensors

The MPxx5010 series piezoresistive transducers are state-of-the-art monolithic silicon pressure sensors designed for a wide range of applications,but particularly those employing a microcontroller or microprocessor with A/D inputs.
Features
• 5.0% Maximum Error over 0° to 85°C
• Ideally Suited for Microprocessor or Microcontroller-Based Systems
• Durable Epoxy Unibody and Thermoplastic (PPS) Surface Mount Package

• Temperature Compensated over -40° to +125°C
• Patented Silicon Shear Stress Strain Gauge
• Available in Differential and Gauge Configurations
• Available in Surface Mount (SMT) or Through-hole (DIP) Configurations

Source: MPX5010 data sheet

NPTEL >> Courses >> Electronics & Communication Engineering >> MEMS and Microsystems (Video) >> 1 - Introduction to MEMS & Microsystems

Introduction to MEMS & Microsystems
Lecture Series on MEMS & Microsystems by Prof. Santiram Kal, Department of Electronics & Electrical Communication Engineering, I.I.T,Kharagpur.

 Introduction to MEMS & Microsystems
 
 Introduction to MEMS & Microsystems

MEMS Materials

Lecture Series on MEMS & Microsystems by Prof. Santiram Kal, Department of Electronics & Electrical Communication Engineering, I.I.T,Kharagpur. For More details on NPTEL visit http://nptel.iitm.ac.in

Lecture - 5 MEMS Materials 

 

MEMS Materials' Properties

Lecture Series on MEMS & Microsystems by Prof. Santiram Kal, Department of Electronics & Electrical Communication Engineering, I.I.T,Kharagpur. For More details on NPTEL visit http://nptel.iitm.ac.in