Piezoelectric Micro Pumps

Takasago Fluidic Systems
Datasheet https://goo.gl/a8GdUm
Piezo electric pump working

Dolomite
Datasheet https://goo.gl/EgSEl8

http://www.curiejet.com/en/products/list.php?pin=49600c3d3d05596e2da84e1774f0c398&type=c

MEMS Product List

http://blog.memsindustrygroup.org/mems-product-list/

Few examples of real MEMS products are:

http://www.eeherald.com/section/design-guide/mems_application_introduction.html

1. Adaptive Optics for Ophthalmic Applications 

2. Optical Cross Connects
3. Air Bag Accelerometers
4. Pressure Sensors
5. Mirror Arrays for Televisions and Displays
6. High Performance Steerable Micromirrors
7. RF MEMS Devices
8. Disposable Medical Devices
9. High Force, High Displacement Electrostatic Actuators
10. MEMS Devices for Secure Communications

MEMS devices used in Space exploration field include:

1. Accelerometers and gyroscopes for inertial navigation
2. Pressure sensors
3. RF switches and tunable filters for communication
4. Tunable mirror arrays for adaptive optics
5. Micro-power sources and turbines
6. Propulsion and attitude control
7. Bio-reactors and Bio-sensors, Microfluidics
8. Thermal control
9. Atomic clocks

MEMS devices for biomedical applications

http://electroiq.com/blog/2013/10/mems-devices-for-biomedical-applications/

Electronic Materials tutorial

Electronic Materials tutorial by
Prof. Dr. Helmut Föll
University of Kiel, Germany

http://www.tf.uni-kiel.de/matwis/amat/elmat_en/

W. Trimmer, ‘‘Microrobots and micromechanical systems,’’ Sens. Actuators, 19, 267–287 (1989)

The classic paper on scaling in microsystems by Trimmer

W. Trimmer, ‘‘Microrobots and micromechanical systems,’’ Sens. Actuators, 19, 267–287 (1989)

Download the Paper


Also read
http://home.earthlink.net/~trimmerw/mems/Scale.html

A brief review of actuation at the micro-scale using electrostatics, electromagnetics and piezoelectric ultrasonics

A brief review of actuation at the micro-scale using electrostatics, electromagnetics and piezoelectric ultrasonics

 The characteristics of electrostatic, electromagnetic and piezoelectric transduction for generating motion at the micro scale is considered, employing scaling laws and a reasoned consideration of the difficulties in motor fabrication and design using each method. 

http://goo.gl/LL6Sxm

http://users.monash.edu.au/~lyeo/Dr_Leslie_Yeo/Publications_files/31_115.pdf

Photos of some MEMS Devices

Photos of some MEMS Devices

http://goo.gl/mrJPZv

http://www.eng.auburn.edu/~deanron/MEMSPhotos.pdf

MPX series Pressure sensors

MPX series Pressure sensors

The MPxx5010 series piezoresistive transducers are state-of-the-art monolithic silicon pressure sensors designed for a wide range of applications,but particularly those employing a microcontroller or microprocessor with A/D inputs.
Features
• 5.0% Maximum Error over 0° to 85°C
• Ideally Suited for Microprocessor or Microcontroller-Based Systems
• Durable Epoxy Unibody and Thermoplastic (PPS) Surface Mount Package

• Temperature Compensated over -40° to +125°C
• Patented Silicon Shear Stress Strain Gauge
• Available in Differential and Gauge Configurations
• Available in Surface Mount (SMT) or Through-hole (DIP) Configurations

Source: MPX5010 data sheet